Alternatives to NMP in semi-conductor manufacturing


Alternatives to N-Methyl-2-Pyrrolidone (NMP) in semi-conductor manufacuring that do not include γ-Butyrolactone (GBL), Dimethyl Sulfoxide (DMSO), or Dimethylacetamide (DMAc).   Primary uses of NMP in semiconductor manufacturing include: * As a solvent in certain photolithography formulations, including photoresists.   * In Bottom Anti-Reflective Coatings (BARC) and polyimides *As a solvent pre-wet of wafers prior to application of spin on polymer * As a component of photoresist stripper formulations.


About Green Chemistry

Green chemistry is the design of chemical products and processes that reduce or eliminate the use and generation of hazardous substances. Green chemistry applies across the life cycle of a chemical product, including its design, manufacture and use and includes 12 fundamental principles. Green chemistry is a critical element of sustainable chemistry, which seeks to reduce the environmental impact of processes and products, optimize the use of finite resources, minimize waste, and meet social needs. Sustainable chemistry is a key element of a broader business strategy for sustainability.

About the GC3

The Green Chemistry & Commerce Council (GC3) is a unique and vibrant cross sectoral, business-to-business network of companies and other organizations working collaboratively to advance green chemistry across sectors and supply chains.  The GC3 was started in 2005 and is based at the University of Massachusetts Lowell.  There are currently 120 members in the GC3, including leading large and small chemical manufacturers, consumer product companies/brands in many sectors, retailers; NGOs; consultants and government agencies.  Members participate in collaborative projects and convene at the GC3’s annual Innovators Roundtable.

Technology Needs from Large Strategics

This green chemistry technology need was provided by the GC3. The GC3 requests green chemistry technology needs — specific, green chemical, material and/or product technologies for which they are actively seeking new green chemistry solutions — from its member companies. This information is used to select startups to pitch at the GC3 Technology Showcases and for collaborative innovation projects.

Alternative should replace:

N-Methyl-2-Pyrrolidone (NMP). Alternatives should not include γ-Butyrolactone (GBL), Dimethyl Sulfoxide (DMSO), or Dimethylacetamide (DMAc).

Green Chemistry & Commerce Council - GC3
Technical Function: Solvent
Sector of Use: SU16 - Manufacture of computer, electronic and optical products, electrical equipment

Company name: Green Chemistry & Commerce Council - GC3
Contact name: Julie Manley

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