Low Pressure Plasma System - PTFE


Low Pressure Plasma Systems are specialized vacuum system components designed, assembled and operated for the specific process of producing plasma chemistry safely and repeatedly.

These Low Pressure Plasma Systems offer a wide range of options for surface modification. Some examples of this would be fine-cleaning of contaminated components, plasma activation of plastic parts, etching of organic or inorganic materials, plasma deposition, low friction coating, and coating of plastic parts with PTFE-like layers (polytetrafluoroethylene). 

Low Pressure Plasma Systems are used in a great variety of industries when it comes to combining materials or changing the surface characteristics of industrial materials.


With low pressure plasma systems, plasma is generated in an evacuated chamber containing a metered or dosed amount of the desired precursor gas or gases. This gas is then excited to change state to a plasma. One of the examples of this excitement would be to pass a radio frequency current through the gas. This RF energy creates a conforming gas plasma that comes in contact with the material surfaces inside the vacuum chamber. Two or more steps can be conducted successively, such as surface cleaning and surface coating, or cleaning, etching, and activating due to advances in plasma system control software.

Low pressure plasma systems are often operated in batch mode, which is ideal for production processing, product testing, and research.

Possible replacement to

The use of DiGlyme.

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