PFOS & PFAS-free KrF photoresists
Alternative
Summary
Positive tone KrF photoresists covering a broad range of applications - PFOS & PFAS free.
Description
GKR series are positive tone KrF photoresist systems that cover a wide range of applications.
- Non PFOS/PFAS materials.
- Superior resistance to plasma etching & ion implantation.
- High thermal stability.
Possible replacement to
PFOS & PFAS KrF photoresists.
